Product Description
A63.7081 Schottky Field Emission Gun Scanning Electron Microscope Pro FEG SEM | ||
Resolution | 1nm@30KV(SE); 3nm@1KV(SE); 2.5nm@30KV(BSE) | |
Magnification | 15x~800000x | |
Electron Gun | Schottky Emission Electron Gun | |
Electron Beam Current | 10pA~0.3μA | |
Accelerating Voatage | 0~30KV | |
Vacuum System | 2 Ion Pumps, Turbo Molecular Pump, Mechanical Pump | |
Detector | SE: High Vacuum Secondary Electron Detector (With Detector Protection) | |
BSE: Semiconductor Four Segmentation Back Scattering Detector | ||
CCD | ||
Specimen Stage | Five Axes Eucentric Motorized Stage | |
Travel Range | X | 0~150mm |
Y | 0~150mm | |
Z | 0~60mm | |
R | 360º | |
T | -5º~75º | |
Max Specimen Diameter | 320mm | |
Modification | EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano Manipulator;SEM+Coating Machine;SEM+Laser Etc. | |
Accessories | X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine Etc. |
Advantage and Cases
Scanning electron microscopy (sem) is suitable for the observation of the surface topography of metals, ceramics, semiconductors, minerals, biology, polymers, composites and nano-scale one-dimensional, two-dimensional and three-dimensional materials (secondary electron image, backscattered electron image).It can be used to analyze the point, line and surface components of microregion.It is widely used in petroleum, geology, mineral field, electronics, semiconductor field, medicine, biology field, chemical industry, polymer material field, criminal investigation of public security, agriculture, forestry and other fields. |
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