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| Specification | A63.7140 | A63.7160 | |
| Key Parameters | Resolution | 1.4nm@15kV(SE) [email protected](BSE) | 0.9nm@30kV(SE) 1.2nm@15kV(SE) 1.5nm@1kV(SE, BD mode） |
| Accelerating Voltage | 0.02kV～30kV | 0.02kV～30kV | |
| Magnification | 1～2000000x | 1～2000000x | |
| Electron Gun | Schottky Thermal Field Emission Gun | Schottky Thermal Field Emission Gun | |
| Probe Current | 1pA~40nA | 1pA~40nA | |
| Field of View | 6mm | 6mm | |
| Dwell Time | 20ns | 20ns | |
| Beam Deflection | -- | Dual Beam Deflection System: Electromagnetic & Static Hybrid Beam Deflection System | |
| Objective Lens | Dual Objective System: Magnetic Objective Lens & Electrostatic Objective Lens, Magnetic Sample Adaptable | Dual Objective System: Magnetic Objective Lens & Electrostatic Objective Lens, Magnetic Sample Adaptable | |
| Gun Aperture | (10μm,30μm,70μm,100μm,150μm,220μm)*2 Sets (1 For Backup), Motorized Moving | (10μm,30μm,70μm,100μm,150μm,220μm)*2 Sets (1 For Backup), Motorized Moving | |
| Chamber | Chamber Size | Width 370mm, Height 330mm, Depth 344mm | Width 370mm, Height 330mm, Depth 344mm |
| Extension Port | 10 Ports | 10 Ports | |
| Vaccum System | 2 Ion Pump 1 Turbo Molecular Pump 1 Mechanical Pump Oil Free | 2 Ion Pump 1 Turbo Molecular Pump 1 Mechanical Pump Oil Free | |
| Gun Vacuum: 2x10-7Pa Chamber Vacuum: 6x10-4Pa | Gun Vacuum: 2x10-7Pa Chamber Vacuum: 6x10-4Pa | ||
| Stage | 5 Axes Auto Stage, X:130mm, Y:130mm, Z:60mm, R: 360°, T: -10°～70°, Maximum load >500g | 5 Axes Auto Stage, X:130mm, Y:130mm, Z:60mm, R: 360°, T: -10°～70°, Maximum load >500g | |
| Camera | Optical Color Navigation CCD High Definition IR CCD | Optical Color Navigation CCD High Definition IR CCD | |
| Detectors & Extensions | Standard | SE Detector | SE Detector Inlens SE Detector |
| PC & Software | Computer | Working Station, Memory 16G, Hard Disk 512G, 24"Monitor, Win10 System | Working Station, Memory 16G, Hard Disk 512G, 24"Monitor, Win10 System |
| Control | Control Panel & Joystick | Control Panel & Joystick | |
| Software | Auto Focus, Auto Stigmator, Auto Brightness Contrast, Image Format TIFF,JPG,PNG,BMP, Image Output Resolution Max 16k*16k | Auto Focus, Auto Stigmator, Auto Brightness Contrast, Image Format TIFF,JPG,PNG,BMP, Image Output Resolution Max 16k*16k | |
| Optional Accessories | A50.7101 | BSE | BSE |
| A50.7102 | - | InLens BSE | |
| A50.7103 | Energy Dispersive Spectroscopy (EDS/EDX) | Energy Dispersive Spectroscopy (EDS/EDX) | |
| A50.7104 | Electron Backscatter Diffraction Pattern (EBSD) | Electron Backscatter Diffraction Pattern (EBSD) | |
| A50.7105 | EDS+EBSD | EDS+EBSD | |
| A50.7106 | Scanning Transmission Electron (STEM) | Scanning Transmission Electron (STEM) | |
| A50.7107 | Electron-beam-induced Current (EBIC) | Electron-beam-induced Current (EBIC) | |
| A50.7108 | Cathodoluminescence (CL) | Cathodoluminescence (CL) | |
| A50.7109 | Plasma | Plasma | |
| A50.7110 | Air Lock, Sample Exchange Warehouse | Air Lock, Sample Exchange Warehouse | |
| A50.7111 | Beam Blanker | Beam Blanker | |
| A50.7120 | Large lmage Stitching Software | Large lmage Stitching Software | |
| A50.7121 | Particle Analysis Software | Particle Analysis Software | |
| A50.7112 | Vacuum Transfer Holder | Vacuum Transfer Holder | |
| A50.7113 | Raman-SEM Correlative System | Raman-SEM Correlative System | |
| A50.7115 | UPS | UPS | |
| A50.7114 | - | Column built-in energy fiter ExB | |
▶Strong Compatibility, High Adaptability Can be installed on different terminals, such as computers, mobile phones, and tablets, to control the electron microscope; This SEM-OS electron microscope operating system is compatible with SEM from various manufacturers and is compatible with multiple models, expanding the SEM ecosystem ▶Integrated Software and Computing, Simple and Efficient Unified user interface, no need to repeatedly adapt to different terminals; Equipped with AI algorithms to collect information and present real-time output effects with clearer image quality and more prominent details; Kernel driven SEM accelerates hardware control |
① Menu bar, ② Quick operation area, ③ Data bar, ④ Monitoring area, ⑤ Navigation area, ⑥ Comprehensive area, ⑦ Operation area, ⑧ Status area |
The A63.7140/A63.7160 series scanning electron microscope is equipped with IGS vacuum transfer rods, EDS energy spectrometers, Raman spectroscopy and other accessories, providing a comprehensive solution for lithium battery research from sample preparation, morphology observation, composition analysis, and structural analysis. |
Step 1：The transfer rod is loaded onto the glove box to complete the sample transfer from the glove box to the transfer rod compartment. Step 2：The sample transfer process involves transferring the positive pressure inside the rod chamber during the transfer process. Step 3：The transfer rod is loaded onto the electron microscope to transfer the sample from the transfer rod chamber to the main chamber of the electron microscope. Step 4：Sample shooting and data post-processing, customized development according to user needs. ▶SEM+ EDS Spectrometer + Vacuum Transfer Rod + Raman Spectroscopy + Analysis Software Structural analysis | Mechanism analysis | High precision displacement table ▪ Make up for the molecular structure analysis that EDS technology cannot achieve, and comprehensively grasp the sample composition ▪ Realize fast switching between Raman optical axis and electron beam optical axis, multi-dimensional analysis of sample characteristics, and real-time tracking.The structural evolution of materials during charging and discharging processes, and the in-depth study of their assisting mechanisms ▪ Large stroke high-precision high-speed piezoelectric ceramic displacement table, achieving integrated data acquisition at the same position, meeting Stability analysis of long-term confocal Raman surface |
Huang Xin