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▶Super Abilities Make Everything Simple ●The sample stage has strong scalability and is very convenient for multi instrument combination to achieve in-situ detection ●One click automatic scanning, capable of programming multiple test points for fast and automated detection ●Keep the sample stationary while scanning the image, and drive the probe to perform XYZ three-dimensional movement measurement imaging ●Gantry scanning head design, marble base, vacuum adsorption stage ●Integrated mechanical vibration damping and environmental noise shielding solution, greatly reducing system noise levels ▶Perfect Combination Of Excellent Experience And High Precision ●Intelligent and fast needle insertion method for automatic detection of piezoelectric ceramics under motor control, protecting probes and samples ● Scanner non-linear correction user editor, with nanometer characterization and measurement accuracy better than 98% |
| ◆ The first commercial atomic force microscope in China that keeps the sample stationary and the probe moves and scans; ◆ The sample size and weight are almost unlimited, especially suitable for the detection of very large samples; ◆ The sample stage is highly expandable, which is very convenient for multi-instrument combination to realize in-situ detection; ◆ Electric control of sample moving table and lifting table, which can be programmed with multi-point position to realize fast automatic detection; ◆ Gantry scanning head design, marble base, vacuum adsorption and magnetic adsorption stage; ◆ The motor automatically controls the intelligent needle feeding method of the piezoelectric ceramic automatic detection to protect the probe and the sample; ◆ High magnification auxiliary optical microscope positioning, real-time observation and positioning of probe and sample scanning area; ◆ Integrated scanner nonlinear correction user editor, nanometer characterization and measurement accuracy better than 98%. |
| A62.4510 | |
| Work Mode | Contact Mode Tapping Mode Friction Mode Magnetic Mode Electrostatic Mode 【Optional】 Phase Mode |
| Current Spectrum Curve | RMS-Z Curve F-Z Force Curve |
| XY Scan Mode | Probe Driven Scanning, Piezo Tube Scanner |
| XY Scan Range | 70×70um |
| XY Scan Resolution | 0.2nm |
| Z Scan Mode | |
| Z Scan Range | 5um |
| Z Scan Resolution | 0.05nm |
| Scan Speed | 0.6Hz~30Hz |
| Scan Angle | 0~360° |
| Sample Weight | ≤15Kg |
| Stage Size | A62.4501-4 4’ 100mm A62.4501-6 6’ 150mm A62.4501-8 8’ 200mm A62.4501-12 12’ 300mm |
| Stage XY Moving | Resolution 1um A62.4501-4 4’ 100x100mm A62.4501-6 6’ 150x150mm A62.4501-8 8’ 200x200mm A62.4501-12 12’ 300x300mm |
| Stage Z Moving | 15mm, Resolution 10nm 【Optional】 20mm 25mm |
| Shock-Absorbing Design | Spring Suspension 【Optional】 Active Shock Absorber |
| Optical System | Objective 10x 5.0M Digital Camera |
| Output | USB2.0/3.0 |
| Software | Win XP/7/8/10 |
| Main Body | Gantry Scan Head, Marble Base |
| Resolution | Working Condition | Working Temperation | Damge to Sample | Inspection Depth | |
| SPM | Atom Level 0.1nm | Normal, Liquid, Vacuum | Room or Low Temperation | None | 1~2 Atom Level |
| TEM | Point 0.3~0.5nm Lattice 0.1~0.2nm | High Vaccum | Room Temperation | Small | Usually<100nm |
| SEM | 6-10nm | High Vaccum | Room Temperation | Small | 10mm @10x 1um @10000x |
| FIM | Atom Level 0.1nm | Super High Vaccum | 30~80K | Damge | Atom Thickness |
| Microscope | Optical Microscope | Electron Microscope | Scanning Probe Microscope |
| Max Resolution (um) | 0.18 | 0.00011 | 0.00008 |
| Remark | Oil immersion 1500x | Imaging diamond carbon atoms | Imaging high-order graphitic carbon atoms |
 |  |  |
| Probe-Sample Interaction | Measure Signal | Information |
| Force | Electrostatic Force | Shape |
| Tunnel Current | Current | Shape, Conductivity |
| Magnetic Force | Phase | Magnetic Structure |
| Electrostatic Force | Phase | charge distribution |
Huang Xin