Magnetron Ion Sputter Coater

7”Color Touch Screen With Friendly GUI Auto Control No Need Manually Control

DC Magnetron Sputtering, Sputtering Current 0-100mA & Sputtering Time 1-999s Continuously Adjustable

Planar Magnetron Target, With Surrounding Dark Area Shield, Including Standard Target Pt or Au

Including Rotary Vane Pump, (Optional Dry Scroll Pump), Pumping Speed 1L/s, Ultimate Vacuum ≤1P

Optional Upgrade: Film Thickness Monitoring, Tilt-rotate Sample Stage

Opto-Edu A50.704 SeriesIon Coater & Carbon Coater, is a series compact coating system able to coat noble metals such as gold (Au), palladium (Pd), platinum (Pt) and gold/palladium (Au/Pd) thin films on non-conductive or poorly conductive specimens. Uniform thin films with fine-grain sizes are formed in a fast cycle time. The produced thin film is suitable for scanning electron microscopy (SEM) analysis, and many other lab experiment material preparation work. The Desk Magnetron Coater is a high productivity tool that delivers consistent and highly repeatable results in the fully automated system. The ergonomic design and small footprint of the SEM coating system allows easy use of the system.

Requirement	Recommend Model
Metal film and Carbon film	A50.7045 (Low vacuum, suitable for magnification less than100000x
Metal film and Carbon film	A50.7045-T (High Vacuum, suitable for magnification over 100000x)
Carbon Coating (ores sample, electron probe sample preparation etc for component analysis, EDS, EBSD ETC)	A50.7043
	A50.7043-T
Sputtering Metal	A50.7041 (Actual magnification less than 50000x, Tungsten filament SEM, table top SEM)
(Au, Pt, Cr, W, etc.)	A50.7042 (Actual magnification less than 100000x, Field emission gun SEM)
	A50.7042-T (Actual magnification better than 100000x, Field emission gun SEM)
Electrode, microelectronic Device Fabricate	A50.7041 (Au, Pt coating)
	A50.7042 (Au, Pt, Ag, Cu, Zn, Im, Sn, etc.)
	A50.7042-T (Most of the metal coating, ITO, AZO Oxide etc.)
Glove Box	A50.7042 customized version
Glove Box	A50.7042-T customized version
Cylindrical Coating	A50.7042 customized version

Item	A50.7041	A50.7042	A50.7042-P	A50.7042-T
Sputtering Target	Planar magnetron target, with surrounding dark area shield
Working Principle	DC sputtering	DCmagnetronsputtering	DC magnetron sputtering	DC magnetron sputtering (optional RF magnetron sputtering)
Dimensions(mm)	424(L)×271(D)×255(H)	424(L)x271(D)x255(H)	420(L)×330(D)×335(H)	424(L)×345(D)×420(H)
Standard Target	Au	Pt	Pt	Pt, Cr, W
Available Targets	Au, Pt etc.	Au, Pt, Ag, Cu, Sb etc.	Au, Pt, Ag, Cu Sb etc.	All metal, ITO, AZO, Si, Te etc.
Target Size	φ57×0.12mm	φ57×0.12mm	φ57×0.12mm	Pt: φ57×0.12mm
Target Size	φ57×0.12mm	φ57×0.12mm	φ57×0.12mm	Others: φ57×1mm
Sputtering Current	2-30mA continuously adjustable	5-45 mA continuously adjustable, step size 1mA	0-100mA continuously adjustable	0-200mA continuously adjustable, step size 5mA
Sputtering Time	1-999s continuously adjustable, step size 2s	1-999s continuously adjustable, step size 1s	1-999s continuously adjustable, step size 1s	1-999s continuously adjustable, step size 1s
Vacuum Chamber	High borosilicate glass φ130×130mm	High borosilicate glass φ130×130mm	High borosilicate glass φ200×130mm	High borosilicate glass φ200×130mm
Vacuum Pump	Rotary vane pump, optional dry scroll pump	Rotary vane pump, optional dry scroll pump	Rotary vane pump, optional dry scroll pump	Molecular pump (built-in) + Rotary vane pump (external)
Pumping Speed	≥1L/s	≥1L/s	≥1L/s	90L/s (molecular pump)+1L/s (rotary vane pump)
Ultimate Vacuum	≤1Pa	≤1Pa	≤1Pa	≤5×10-3Pa (within 8 minutes)
Working Vacuum	2-30Pa	2-30Pa	4-20Pa	0.4-2Pa(related to the target)
Working Vacuum	2-30Pa	(related to the target)	4-20Pa	0.4-2Pa(related to the target)
Display	5-inch color touch screen, resolution 800×480	5-inch color touch screen, resolution 800×480	7-inch color touch screen, resolution 800×480	7-inch color touch screen, resolution 800×480
Rated Power	500W	450W	500W	800W
Input Voltage Supply	Standard 220V/50Hz Optional 110V/60Hz
Working Medium	Air or Argon	Air or Argon	Air or Argon	High-purity argon (argon purity 4N and above)
Sample Stage	φ64mm stainless steel sample stage	φ64mm stainless steel sample stage	φ125mm stainless steel sample stage	φ125mm stainless steel sample stage
Sample Stage Speed	Optional	Optional	4-20rpm adjustable	4-20rpm adjustable

Pictures

Model No.

A50.7042-P

Working Distance

格式:1.0,或1.0~2.0

Focusing Scale

0.000000

Focusing Range

0.000000

Working Stage Size

格式:100x100mm,或 Dia.100mm

Head Light Path

100x

Standard Magnification

10x

Optical System

Key Feature, 只写最重要的几条特征, 展示在对比界面

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